Post-production correction of lamellar x-ray gratings by ion beam figuring

D. L. Voronov; T. Wang; S. Park; L. Huang; E. M. Gullikson; F. Salmassi; S. Ch. Samudrala; H. A. Padmore; M. Idir

doi:10.1117/12.3030116

8 October 2024 Post-production correction of lamellar x-ray gratings by ion beam figuring

D. L. Voronov, T. Wang, S. Park, L. Huang, E. M. Gullikson, F. Salmassi, S. Ch. Samudrala, H. A. Padmore, M. Idir

Author Affiliations +

Proceedings Volume 13150, Advances in X-Ray/EUV Optics and Components XIX; 131500B (2024) https://doi.org/10.1117/12.3030116
Event: Optical Engineering + Applications, 2024, San Diego, California, United States

Abstract

Ion-beam figuring (IBF) capable of providing sub-nanometer shape accuracy, is often used for fabrication of ultra-precise x-ray optics. However, in the case of gratings, the optical surface may degrade during the following ruling procedure or etching processes. This leads to the necessity for a post-ruling surface correction to recover the ultra-precise shape of the optics, while the IBF substrate finish prior the ruling could be omitted. If so, the gratings can be made using relatively inexpensive substrates produced with conventional mechanical or chemical-mechanical polishing with medium optical surface quality and then processed with a post-ruling IBF to bring the shape to the sub-nanometer accuracy. The key question is whether the grating grooves survive the IBF treatment. In this work we investigate the possibility of post-production IBF correction for lamellar x-ray gratings. A 200 lines/mm lamellar grating made using a lambda/20 Si substrate was processed with IBF to achieve a sub-nanometer flat optical surface of the final grating. We report on impact of the IBF process on groove profile, surface roughness, and diffraction efficiency of the grating.

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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

D. L. Voronov, T. Wang, S. Park, L. Huang, E. M. Gullikson, F. Salmassi, S. Ch. Samudrala, H. A. Padmore, and M. Idir "Post-production correction of lamellar x-ray gratings by ion beam figuring", Proc. SPIE 13150, Advances in X-Ray/EUV Optics and Components XIX, 131500B (8 October 2024); https://doi.org/10.1117/12.3030116

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