Measurement of coating thickness by two-wavelength phase-shift method

Yueguang Lu; Zhaoyue Pei; Xia Zhao; Lingzhen Jiang; Jing Hong

doi:10.1117/12.34873

1 July 1990 Measurement of coating thickness by two-wavelength phase-shift method

Yueguang Lu, Zhaoyue Pei, Xia Zhao, Lingzhen Jiang, Jing Hong

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34873
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

The principLe of twowavelength phaseshift interferometry was described. Appling this method to the measurement of coating thickness of dichromated gelatin satisfied resuLts was obtained.

Citation Download Citation

Yueguang Lu, Zhaoyue Pei, Xia Zhao, Lingzhen Jiang, and Jing Hong "Measurement of coating thickness by two-wavelength phase-shift method", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34873

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