Optical microtopographer for rough surfaces

Manuel Filipe M. Costa; Jose B. Almeida

doi:10.1117/12.34864

1 July 1990 Optical microtopographer for rough surfaces

Manuel Filipe M. Costa, Jose B. Almeida

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34864
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

We describe a noncontact optical microtopographer designed to map the relief of rough surfaces with resolutions in the submicron order. The principle of operation is based on the horizontal shift of a bright light spot on an horizontal surface illuminated by an oblique light beam when that surface suffers a vertical displacement. In this system the optical mecanical and electrooptical hardware contraints are more important than the software ones in oposition to what happens in other systems namely those using fringe projection.

Citation Download Citation

Manuel Filipe M. Costa and Jose B. Almeida "Optical microtopographer for rough surfaces", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34864

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