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20 November 2024 Pupil segmentation beam collimation method
Zijin Deng, Changwei Li
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Proceedings Volume 13241, Optical Metrology and Inspection for Industrial Applications XI; 132411B (2024) https://doi.org/10.1117/12.3030905
Event: SPIE/COS Photonics Asia, 2024, Nantong, Jiangsu, China
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Abstract
In this paper, an approach for beam collimation by pupil segmentation is proposed. In this approach, the divergent or convergent wavefront of the beam to be collimated is divided into a series of subwavefronts by a microlens array, and the beam collimation is realized by comparing the difference of centroids between the actual spots and the reference ones under the paraxial approximation. In the experiment, the size of the beam to be collimated is limited by a stop aperture to satisfy the paraxial approximation. Using the proposed method, a divergent beam is collimated by a doublet with a focal length of 100 mm under the paraxial approximation. The test results of the collimated beam by a Shack-Hartmann sensor show that the root mean square of the wavefront of the collimated beam is 0.02 λ, having a good agreement with results of the proposed method. The experimental results show that the method is simple, low cost and highly accurate.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Zijin Deng and Changwei Li "Pupil segmentation beam collimation method", Proc. SPIE 13241, Optical Metrology and Inspection for Industrial Applications XI, 132411B (20 November 2024); https://doi.org/10.1117/12.3030905
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KEYWORDS
Collimation
Beam divergence
Wavefront sensors
Microlens array
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