High groove density diffraction grating replication based on UV composite rolling technology

Peixin Ding; Weimin Shen; Xinhua Chen; Zijiang Yang

doi:10.1117/12.3040443

13 September 2024 High groove density diffraction grating replication based on UV composite rolling technology

Peixin Ding, Weimin Shen, Xinhua Chen, Zijiang Yang

Author Affiliations +

Proceedings Volume 13254, Fourth International Conference on Optics and Image Processing (ICOIP 2024); 132540Z (2024) https://doi.org/10.1117/12.3040443
Event: Fourth International Conference on Optics and Image Processing (ICOIP 2024), 2024, Chongqing, China

Abstract

The preparation technology of high groove density gratings is generally complex and costly, while nanoimprint technology has the ability to prepare large quantities of high-precision micro-nano structures. Therefore, nanoimprint technology is used to study the replication process of grazing incidence high groove density gratings used in Littman-type external cavity semiconductor lasers (ECDL). A UV composite rolling technology is used to imprint the high groove density grating groove area on the ULE glass substrate, and the grating replication is completed after coating. Replicated grating performance was tested and characterized with high fidelity.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Peixin Ding, Weimin Shen, Xinhua Chen, and Zijiang Yang "High groove density diffraction grating replication based on UV composite rolling technology", Proc. SPIE 13254, Fourth International Conference on Optics and Image Processing (ICOIP 2024), 132540Z (13 September 2024); https://doi.org/10.1117/12.3040443

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