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18 November 2024 Dwell time calculation for CCOS of x-ray focusing mirror mold based on ADMM algorithm
Kun Wang, Shuoqi Lv
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Proceedings Volume 13417, International Conference on Precision Instruments and Optical Engineering (PIOE 2024); 134170M (2024) https://doi.org/10.1117/12.3052712
Event: 4th International Conference on Precision Instruments and Optical Engineering (PIOE 2024), 2024, Kuala Lumpur, Malaysia
Abstract
X-ray focusing mirrors are of significant value in the field of optical inspection. Their imaging quality requires highprecision reflective surface. This paper proposes a method for calculating dwell time based on the Alternating Direction Method of Multipliers (ADMM) in Computer Controlled Optical Surfacing (CCOS), suitable for correcting surface error of cylindrical mold used in X-ray focusing mirrors. Through mathematical modeling, and material removal model derivation, a dwell time calculation model based on linear equations is established and solved using the ADMM algorithm. Simulation results demonstrate that this method outperforms the traditional Least Squares QR Decomposition (LSQR) algorithm in terms of surface precision, convergence rate, and algorithmic efficiency.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Kun Wang and Shuoqi Lv "Dwell time calculation for CCOS of x-ray focusing mirror mold based on ADMM algorithm", Proc. SPIE 13417, International Conference on Precision Instruments and Optical Engineering (PIOE 2024), 134170M (18 November 2024); https://doi.org/10.1117/12.3052712
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KEYWORDS
Mirror surfaces
Mirrors
Optical surfaces
Surface finishing
X-rays
Polishing
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