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10 December 2024 Thermal microscopic imaging based on diffusion models for super-resolution inspection
Xin Sun, Jun Ke, Xu Ma
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Proceedings Volume 13423, Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024); 134231E (2024) https://doi.org/10.1117/12.3053147
Event: 8th International Workshop on Advanced Patterning Solutions (IWAPS 2024), 2024, Jiaxing, Zhejiang, China
Abstract
Existing infrared micro-thermal imaging often faces low resolution and contrast issue, which hinder its applications in high-precision integrated circuit inspection. Based on the advanced super-resolution techniques, high-resolution infrared images can be reconstructed from low-resolution measurements. Recently, diffusion models have shown strong capacity in the image reconstruction tasks. However, due to the low signal-to-noise ratio and inferior contrast, directly applying the traditional diffusion models to the infrared image is hardly to obtain high-quality super-resolution results. In this work, we first design a degradation model for real infrared imaging systems, and then we design an infrared super-resolution diffusion model based on ResShift, which introduces uncertainty into the u-net to enhance the robustness of the model and the reconstruction quality of the infrared images. The proposed method is validated based on a set of numerical experiments.
(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Xin Sun, Jun Ke, and Xu Ma "Thermal microscopic imaging based on diffusion models for super-resolution inspection", Proc. SPIE 13423, Eighth International Workshop on Advanced Patterning Solutions (IWAPS 2024), 134231E (10 December 2024); https://doi.org/10.1117/12.3053147
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KEYWORDS
Imaging systems
Infrared imaging
Diffusion
Image restoration
Super resolution
Image processing
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