Design, fabrication, and measurement of 500-750 GHz silicon waveguide transitions based on gap waveguide

Yaohui Yang; Shunli Han; Yajing Liu; Jinpeng Yang; Ting Zhang

doi:10.1117/12.3046009

13 December 2024 Design, fabrication, and measurement of 500-750 GHz silicon waveguide transitions based on gap waveguide

Yaohui Yang, Shunli Han, Yajing Liu, Jinpeng Yang, Ting Zhang

Author Affiliations +

Proceedings Volume 13495, AOPC 2024: Terahertz Technology and Applications; 1349508 (2024) https://doi.org/10.1117/12.3046009
Event: Applied Optics and Photonics China 2024 (AOPC2024), 2024, Beijing, China

Abstract

The design, fabrication and measurement process of silicon based waveguide transitions working from 500 GHz to 750 GHz is reported in this paper. Gap waveguide is applied to the waveguide cavity design. The electromagnetic bandgap characteristic helps to split the three dimensional structure into slices. Hence the waveguide transition could be composed of thin gold coating silicon layers. Micro-electro-mechanical system (MEMS) technology is used for the fabrication of periodic pins and multi-step transitions. A metallic clamp is designed for measurement. Measured results show that the transmission loss is better than 0.13 dB/mm and the reflection coefficient is lower than -9 dB.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yaohui Yang, Shunli Han, Yajing Liu, Jinpeng Yang, and Ting Zhang "Design, fabrication, and measurement of 500-750 GHz silicon waveguide transitions based on gap waveguide", Proc. SPIE 13495, AOPC 2024: Terahertz Technology and Applications, 1349508 (13 December 2024); https://doi.org/10.1117/12.3046009

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE