Current topics of interest in optical metrology

Albert F. Slomba

doi:10.1117/12.35030

1 October 1990 Current topics of interest in optical metrology

Albert F. Slomba

Proceedings Volume 1375, ICALEO '89: Optical Sensing and Measurement; (1990) https://doi.org/10.1117/12.35030
Event: ICALEO89, 1989, Orlando, FL, United States

Abstract

The process of accommodating extreme measurement geometries, including aspheric cylindrical surfaces, is considered, and an absolute calibration technique for linear surfaces capable of 0.0067 wavelength (42 A) p-p with a precision (1-sigma) of 0.0008 wavelength 5 A is described. The technique was used to measure the absolute axial sag on the inside of a X-ray telescope.

Citation Download Citation

Albert F. Slomba "Current topics of interest in optical metrology", Proc. SPIE 1375, ICALEO '89: Optical Sensing and Measurement, (1 October 1990); https://doi.org/10.1117/12.35030

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