Versatility of metal organic chemical vapor deposition process for fabrication of high-quality YBCO superconducting thin films

Chyi Shyuan Chern; Jing-Fu Zhao; Y. Q. Li; Peter E. Norris; B. H. Kear; B. M. Gallois

doi:10.1117/12.25756

1 March 1991 Versatility of metal organic chemical vapor deposition process for fabrication of high-quality YBCO superconducting thin films

Chyi Shyuan Chern, Jing-Fu Zhao, Y. Q. Li, Peter E. Norris, B. H. Kear, B. M. Gallois

Author Affiliations +

Proceedings Volume 1394, Progress In High-Temperature Superconducting Transistors and Other Devices; (1991) https://doi.org/10.1117/12.25756
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

YBCO films, having critical current densities in excess of 10 to the 6th A/sq cm at 77 K and transition temperatures of about 89 K, successfully deposited on close lattice matched substrate materials at substrate temperature in the range from 720 to 740 C, are presented. The critical current densities are 10,000 A/sq cm at 70 K and the critical temperatures are 82 K for the films deposited on sapphire substrates. Successful deposition of c-axis oriented YBCO films with a transition temperature of 85 K was also achieved on silver substrates. Detailed analyses of the films were carried out by X-ray diffraction, EDS, SEM, resistivity measurements, critical current density measurements, and magnetization susceptibility measurements.

Citation Download Citation

Chyi Shyuan Chern, Jing-Fu Zhao, Y. Q. Li, Peter E. Norris, B. H. Kear, and B. M. Gallois "Versatility of metal organic chemical vapor deposition process for fabrication of high-quality YBCO superconducting thin films", Proc. SPIE 1394, Progress In High-Temperature Superconducting Transistors and Other Devices, (1 March 1991); https://doi.org/10.1117/12.25756

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