High-average power XeCl laser with surface corona-discharge preionization

Haruhiko Nagai; Kenyu Haruta; Yukio Sato; Masao Inoue; Akihiro Suzuki

doi:10.1117/12.26024

1 February 1991 High-average power XeCl laser with surface corona-discharge preionization

Haruhiko Nagai, Kenyu Haruta, Yukio Sato, Masao Inoue, Akihiro Suzuki

Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.26024
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain

Abstract

A new combination of a surface corona-discharge preionization (SCP) electrode with a spiker-sustainer circuit is investigated for the development of a high-average power XeCl excimer laser with high repetition rate. The investigation for single shot operation proves the potentialities of the combination scheme. The result of repetitive operation demonstrates the promising prospect as an excitation scheme of industrial high-power excimer 1aser.

Citation Download Citation

Haruhiko Nagai, Kenyu Haruta, Yukio Sato, Masao Inoue, and Akihiro Suzuki "High-average power XeCl laser with surface corona-discharge preionization", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); https://doi.org/10.1117/12.26024

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available