Paper
1 July 1991 Edge effects in silicon photodiode arrays
Steven B. Kenney, E. Dan Hirleman
Author Affiliations +
Abstract
Photodiode arrays used in laser diffraction particle sizing instruments must be calibrated to account for detector-to-detector variations in sensitivity. We have calibrated an Insitec EPCS-P ring detector (planar-diffused, p on n silicon photodiode array) by scanning a focussed laser beam across the detector surface. A deconvolution of the known intensity distribution of the laser beam from the measured signal resulted in detector response as a function of position. Detector response was approximately constant over the region of the ideal active detector and it decreased exponentially in the region beyond the ideal detector boundary. A diffusion length constant of 50 microns gave the best fit to the measured data. Theoretical predictions of calibration factors based on measured detector response agreed reasonably well with Malvem and Insitec calibration factors obtained from the traditional uniform light illumination method. This indicates that edge effects in different ring detectors are similar.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Steven B. Kenney and E. Dan Hirleman "Edge effects in silicon photodiode arrays", Proc. SPIE 1480, Sensors and Sensor Integration, (1 July 1991); https://doi.org/10.1117/12.46494
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KEYWORDS
Sensors

Calibration

Diffusion

Signal detection

Silicon

Photodiodes

Chemical elements

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