Super small excimer laser

Arnold A. Vill; Ants A. Salk; Irina K. Berik

doi:10.1117/12.46920

1 September 1991 Super small excimer laser

Arnold A. Vill, Ants A. Salk, Irina K. Berik

Proceedings Volume 1503, Excimer Lasers and Applications III; (1991) https://doi.org/10.1117/12.46920
Event: ECO4 (The Hague '91), 1991, The Hague, Netherlands

Abstract

The construction and some characteristics of XeCl excimer lasers with active volumes of 0.4 cm3 and 1 cm3, and output energies of 50 (mu) J and 1.6 mJ, respectively, are described. In both cases, preionization by discharge on the ceramic surfaces of peaking capacitors is used in excitation schemes. In the case of the second laser, 'electric wind' is used in gas circulation which allows it to work with pulse rates up to 100 Hz.

Citation Download Citation

Arnold A. Vill, Ants A. Salk, and Irina K. Berik "Super small excimer laser", Proc. SPIE 1503, Excimer Lasers and Applications III, (1 September 1991); https://doi.org/10.1117/12.46920

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available