Quasi-Real-Time High Precision Interferometric Measurements Of Deforming Surfaces

N. A. Massie

doi:10.1117/12.938227

15 December 1978 Quasi-Real-Time High Precision Interferometric Measurements Of Deforming Surfaces

N. A. Massie

Proceedings Volume 0153, Advances in Optical Metrology I; (1978) https://doi.org/10.1117/12.938227
Event: 22nd Annual Technical Symposium, 1978, San Diego, United States

Abstract

Using a heterodyne interferometer of unique design, high precision measurements of optical surfaces while undergoing deformation have been obtained. The device is described and results of various investigations are presented.

Citation Download Citation

N. A. Massie "Quasi-Real-Time High Precision Interferometric Measurements Of Deforming Surfaces", Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); https://doi.org/10.1117/12.938227

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