Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine

Kazuo Yoshikawa; Takashi Nomura; Hatsuzo Tashiro; Masane Suzuki; Masao Usuki; Fumio Kobayashi

doi:10.1117/12.134853

1 January 1992 Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine

Kazuo Yoshikawa, Takashi Nomura, Hatsuzo Tashiro, Masane Suzuki, Masao Usuki, Fumio Kobayashi

Proceedings Volume 1531, Advanced Optical Manufacturing and Testing II; (1992) https://doi.org/10.1117/12.134853
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

This paper presents the technique of an on-machine precision profile measurement, through a kind of common-path interferometer using a zone-plate. We could analyze profile errors of a spherical mirror on the machine turning at a speed of 900 rpm. The results of experiments are evaluated.

Citation Download Citation

Kazuo Yoshikawa, Takashi Nomura, Hatsuzo Tashiro, Masane Suzuki, Masao Usuki, and Fumio Kobayashi "Profile measurement of concave mirror by a common-path interferometer on ultraprecision machine", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); https://doi.org/10.1117/12.134853

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