Fabrication of microlenses by laser-assisted chemical etching

Edward John Gratrix; Charles B. Zarowin

doi:10.1117/12.49396

1 November 1991 Fabrication of microlenses by laser-assisted chemical etching

Edward John Gratrix, Charles B. Zarowin

Author Affiliations +

Proceedings Volume 1544, Miniature and Micro-Optics: Fabrication and System Applications; (1991) https://doi.org/10.1117/12.49396
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

The laser assisted chemical etching technique (LACE) is capable of generating high quality aspheric microlenses, as well as other miniature components such as prisms and waveguides. Using a calculated intensity map it is possible to individually specify the optical properties of each element in the array. To date, arrays of high quality lenslets have been fabricated with specifications ranging from f/0.7 to f/10 with spacing of 50 to 300 (mu) . Microlenses have been generated in glass, silicon, CdTe and sapphire having 95 fill factors with figure quality better than 1/10th wave.

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Edward John Gratrix and Charles B. Zarowin "Fabrication of microlenses by laser-assisted chemical etching", Proc. SPIE 1544, Miniature and Micro-Optics: Fabrication and System Applications, (1 November 1991); https://doi.org/10.1117/12.49396

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