Construction of a micro-zone-plate for a scanning x-ray microscope at Hefei

Yong Feifei Zhao; Xingshu Xie; Xinya Lei; Youzhou Zhao; Lide Zhang

doi:10.1117/12.51228

1 January 1992 Construction of a micro-zone-plate for a scanning x-ray microscope at Hefei

Yong Feifei Zhao, Xingshu Xie, Xinya Lei, Youzhou Zhao, Lide Zhang

Proceedings Volume 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics; (1992) https://doi.org/10.1117/12.51228
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

At the Hefei Synchrotron Radiation Laboratory (HESYRL), beamline 6A is dedicated to soft x-ray imaging studies. We are constructing a prototype scanning soft x-ray microscope. An effort in the fabrication of microzone plate has been started. We have designed and fabricated the first Fresnel zone plate as a microzone plate in China. Our microzone plates are fabricated by UV exposure. The finest width of the outmost zone is about 0.5 micrometers . In this paper, we describe the design and fabrication of our microzone plate and report first results.

Citation Download Citation

Yong Feifei Zhao, Xingshu Xie, Xinya Lei, Youzhou Zhao, and Lide Zhang "Construction of a micro-zone-plate for a scanning x-ray microscope at Hefei", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); https://doi.org/10.1117/12.51228

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available