Reflectivity measurements of Ni/V, Ni/Ti, and W/C multilayer mirrors in the 2-6nm wavelength region using synchrotron radiation

Hiroshi Nagata; Yukinobu Ishino; Shoji Seki; Masataka Shin'ogi; Tsuneaki Miyahara

doi:10.1117/12.51217

1 January 1992 Reflectivity measurements of Ni/V, Ni/Ti, and W/C multilayer mirrors in the 2-6nm wavelength region using synchrotron radiation

Hiroshi Nagata, Yukinobu Ishino, Shoji Seki, Masataka Shin'ogi, Tsuneaki Miyahara

Author Affiliations +

Proceedings Volume 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics; (1992) https://doi.org/10.1117/12.51217
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Recent progress in the fields of physical vapor deposition (PVD), coupled with increased interest in the soft x-ray region of the electromagnetic spectrum, has driven the development of layered synthetic microstructures (LSMs) to the point that useful nongrazing incidence optics based on this technology are used in a variety of applications (e.g., solar astronomy, soft x-ray microscopy, and plasma spectroscopy). Our goal, as a production facility for thin film devices, was to demonstrate the capability for surement at 0.154 nm (CuK(alpha) ).

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Hiroshi Nagata, Yukinobu Ishino, Shoji Seki, Masataka Shin'ogi, and Tsuneaki Miyahara "Reflectivity measurements of Ni/V, Ni/Ti, and W/C multilayer mirrors in the 2-6nm wavelength region using synchrotron radiation", Proc. SPIE 1546, Multilayer and Grazing Incidence X-Ray/EUV Optics, (1 January 1992); https://doi.org/10.1117/12.51217

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