Exploring the limits of phase-shift lithography: Part I--the alternating shifter

Shane R. Palmer; Cesar M. Garza Sr.; Craig B. Sager; Patrick Reynolds

doi:10.1117/12.130311

1 June 1992 Exploring the limits of phase-shift lithography: Part I--the alternating shifter

Shane R. Palmer, Cesar M. Garza Sr., Craig B. Sager, Patrick Reynolds

Proceedings Volume 1674, Optical/Laser Microlithography V; (1992) https://doi.org/10.1117/12.130311
Event: Microlithography '92, 1992, San Jose, CA, United States

Abstract

Phase shift technology shows promise to extend the useful resolution and focus latitude to contemporary optical steppers. If successful in application, this represents significant cost savings to the manufacturing wafer fobs provided that the steppers can be used or modified to take advantage of phase-shift techniques. In this paper we explore the limits of phase-shift lithography, particularly at i-line. We do this following a two-fold approach: a) using simulations and b) collecting experimental data using different resist processes and phase-shift techniques. We conclude that using state-of-the-art photoresist processes and phase-shift techniques, i-line optical lithography can be extended to the 0.25 ?m regime.

Citation Download Citation

Shane R. Palmer, Cesar M. Garza Sr., Craig B. Sager, and Patrick Reynolds "Exploring the limits of phase-shift lithography: Part I--the alternating shifter", Proc. SPIE 1674, Optical/Laser Microlithography V, (1 June 1992); https://doi.org/10.1117/12.130311

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available