Paper
13 January 1993 New results from MAXIMUM: an x-ray scanning photoemission microscope
W. Ng, Avijit K. Ray-Chaudhuri, S. H. Liang, John T. Welnak, John P. Wallace, S. Singh, Cristiano Capasso, Franco Cerrina, Giorgio Margaritondo, James H. Underwood, Jeffrey B. Kortright, Rupert C. C. Perera
Author Affiliations +
Abstract
The scanning soft x-ray photoemission microscope (MAXIMUM) operating at the Synchrotron Radiation Center at the University of Wisconsin-Madison has been substantially upgraded. The major upgrades are: installation of a new beam line that is optimized for the microscope; new optical mount and alignment system for the Schwarzschild objective; a new scanning stage; installation of a cylindrical mirror analyzer; implementation of an ultrahigh vacuum sample preparation chamber and transfer system; a new window-driven data acquisition program that is more flexible and user-friendly. The new system had demonstrated better than 0.1 micrometers spatial resolution, and photoemission data with 350 meV energy resolution has been obtained.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
W. Ng, Avijit K. Ray-Chaudhuri, S. H. Liang, John T. Welnak, John P. Wallace, S. Singh, Cristiano Capasso, Franco Cerrina, Giorgio Margaritondo, James H. Underwood, Jeffrey B. Kortright, and Rupert C. C. Perera "New results from MAXIMUM: an x-ray scanning photoemission microscope", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); https://doi.org/10.1117/12.138744
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Cited by 5 scholarly publications.
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KEYWORDS
Microscopes

Mirrors

Gallium arsenide

X-rays

X-ray microscopy

Gold

Spatial resolution

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