Polarization-based phase-shifting method for shape contours

Jing Fang; Y. P. Ma; Hong-Min Shi; Xuesong Li; Guoying Wu

doi:10.1117/12.138803

11 December 1992 Polarization-based phase-shifting method for shape contours

Jing Fang, Y. P. Ma, Hong-Min Shi, Xuesong Li, Guoying Wu

Proceedings Volume 1746, Polarization Analysis and Measurement; (1992) https://doi.org/10.1117/12.138803
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A phase shifting technique of changing polarization state in a Twyman-Green interferometer is presented to measure the shape of the object surface. The wavefronts of the reference beam and object beam are orthogonally polarized. They are resolved by a quarter-wave plate and then detected by a polarizer as an analyzer. Four intensity measurements with phase difference associated with polarization variation are used to obtain interferometric phase corresponding to shape contour.

Citation Download Citation

Jing Fang, Y. P. Ma, Hong-Min Shi, Xuesong Li, and Guoying Wu "Polarization-based phase-shifting method for shape contours", Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); https://doi.org/10.1117/12.138803

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