Design review of a unique out-of-plane polarimetric scatterometer

Tod F. Schiff; John C. Stover; Daniel J. Wilson; Brett D. Swimley; Mark E. Southwood; Donald R. Bjork

doi:10.1117/12.141440

12 February 1993 Design review of a unique out-of-plane polarimetric scatterometer

Tod F. Schiff, John C. Stover, Daniel J. Wilson, Brett D. Swimley, Mark E. Southwood, Donald R. Bjork

Proceedings Volume 1753, Stray Radiation in Optical Systems II; (1993) https://doi.org/10.1117/12.141440
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

This paper reviews a scatterometer which is capable of measuring scatter throughout most of the sphere surrounding the sample. The instrument can be configured to operate at many different laser wavelengths, or with a broadband source, at virtually any angle of incidence. Automated polarization control of both source and receiver has been accomplished, which allows calculation of incident and scattered Stokes vectors as well as the Mueller matrix associated with either reflective or transmissive samples. This paper forms the background material for the two papers that follow it in this proceeding.

Citation Download Citation

Tod F. Schiff, John C. Stover, Daniel J. Wilson, Brett D. Swimley, Mark E. Southwood, and Donald R. Bjork "Design review of a unique out-of-plane polarimetric scatterometer", Proc. SPIE 1753, Stray Radiation in Optical Systems II, (12 February 1993); https://doi.org/10.1117/12.141440

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