Silicon waferboard detector module for an optical heterodyne balanced receiver with integrated bypass capacitors

Andrew Silletti; Marvin J. Tabasky; Paul M. Hill; Paul O. Haugsjaa; Michael Urban

doi:10.1117/12.141923

6 April 1993 Silicon waferboard detector module for an optical heterodyne balanced receiver with integrated bypass capacitors

Andrew Silletti, Marvin J. Tabasky, Paul M. Hill, Paul O. Haugsjaa, Michael Urban

Author Affiliations +

Proceedings Volume 1794, Integrated Optical Circuits II; (1993) https://doi.org/10.1117/12.141923
Event: Fibers '92, 1992, Boston, MA, United States

Abstract

We describe the design, fabrication, and testing of a silicon waferboard dual-detector module used in an integrated optical heterodyne balanced receiver. This 'Silicon Waferboard' approach, as its name implies, substitutes a silicon substrate incorporating precision micromachined structures in lieu of conventional printed circuit boards and has been used for both optical transmitter and receiver fabrication. Our dual-detector receiver substrate incorporates orientation-dependent etched v-grooves for fiber placement in addition to metal/insulator/metal (MIM) bypass capacitors and high-speed photodetectors. Preliminary measurements indicated a receiver bandwidth potential of 14 GHz. The performance of the dual-detector receiver module as well as its individual components will be described.

Citation Download Citation

Andrew Silletti, Marvin J. Tabasky, Paul M. Hill, Paul O. Haugsjaa, and Michael Urban "Silicon waferboard detector module for an optical heterodyne balanced receiver with integrated bypass capacitors", Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); https://doi.org/10.1117/12.141923

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available