Application of concept selection methodology in IC process design

Myung-Kul Kim

doi:10.1117/12.139339

14 January 1993 Application of concept selection methodology in IC process design

Myung-Kul Kim

Proceedings Volume 1802, Microelectronics Manufacturing and Reliability; (1993) https://doi.org/10.1117/12.139339
Event: Microelectronic Processing '92, 1992, San Jose, CA, United States

Abstract

Search for an effective methodology practical in IC manufacturing process development led to trial of quantitative 'concept selection' methodology in selecting the 'best' alternative for interlevel dielectric (ILD) processes. A cross-functional team selected multi-criteria with scoring guidelines to be used in the definition of the 'best'. The project was targeted for the 3 level metal backend process for sub-micron gate array product. The outcome of the project showed that the maturity of the alternatives has strong influence on the scores, because scores on the adopted criteria such as yield, reliability and maturity will depend on the maturity of a particular process. At the same time, the project took longer than expected since it required data for the multiple criteria. These observations suggest that adopting a simpler procedure that can analyze total inherent controllability of a process would be more effective. The methodology of the DFS (design for simplicity) tools used in analyzing the manufacturability of such electronics products as computers, phones and other consumer electronics products could be used as an 'analogy' in constructing an evaluation method for IC processes that produce devices used in those electronics products. This could be done by focusing on the basic process operation elements rather than the layers that are being built.

Citation Download Citation

Myung-Kul Kim "Application of concept selection methodology in IC process design", Proc. SPIE 1802, Microelectronics Manufacturing and Reliability, (14 January 1993); https://doi.org/10.1117/12.139339

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available