Paper
1 July 1993 CMOS compatible photodetectors for optical interconnects
John E. Childers, James E. Morris, Michael R. Feldman
Author Affiliations +
Proceedings Volume 1849, Optoelectronic Interconnects; (1993) https://doi.org/10.1117/12.147103
Event: OE/LASE'93: Optics, Electro-Optics, and Laser Applications in Scienceand Engineering, 1993, Los Angeles, CA, United States
Abstract
In this paper we describe the design and testing of a high speed photodetector that is fully integrated into a CMOS chip, with a response time of 2.6 ns and an operating speed of 112 MHz. The photodetector is to be used in an optically interconnected multi-chip module.
© (1993) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John E. Childers, James E. Morris, and Michael R. Feldman "CMOS compatible photodetectors for optical interconnects", Proc. SPIE 1849, Optoelectronic Interconnects, (1 July 1993); https://doi.org/10.1117/12.147103
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Sensors

Palladium

Photodetectors

CMOS sensors

Silicon

Diffusion

Quantum efficiency

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