Microtopographic inspection by optical triangulation

Manuel F. M. Costa

doi:10.1117/12.2308815

23 July 1993 Microtopographic inspection by optical triangulation

Manuel F. M. Costa

Proceedings Volume 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology; 1983B0 (1993) https://doi.org/10.1117/12.2308815
Event: 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1993, Budapest, Hungary

Abstract

Methodology and instrumentation for automatic measurements of high accuracy optical flats is described. These include the homogeneity of material and shape of optical surfaces testing. The expert system applies alternatively: Fourier transform and spatial carrier phase-shifting method for interferers analysis and the new three step method for refractive index distribution testing. The error analysis and examples of measurements are presented.

Citation Download Citation

Manuel F. M. Costa "Microtopographic inspection by optical triangulation", Proc. SPIE 1983, 16th Congress of the International Commission for Optics: Optics as a Key to High Technology, 1983B0 (23 July 1993); https://doi.org/10.1117/12.2308815

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