In-position optical surface measurement for x-ray projection lithography optics: theory and simulation

Eiichi Seya; Minoru Hidaka; Masaaki Ito; Souichi Katagiri; Eiji Takeda

doi:10.1117/12.165471

10 December 1993 In-position optical surface measurement for x-ray projection lithography optics: theory and simulation

Eiichi Seya, Minoru Hidaka, Masaaki Ito, Souichi Katagiri, Eiji Takeda

Proceedings Volume 2003, Interferometry VI: Techniques and Analysis; (1993) https://doi.org/10.1117/12.165471
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

A technique is proposed to measure x-ray projection optics. Simultaneous linear equations are derived from the wavefront distortions to obtain form errors of optical surfaces discretely. Simulations proved that the arithmetic operation errors are small enough to achieve nanometer level accuracy. This technique is effective to test aspheric reflectors, as well as the reflector misalignments. It also is able to be applied to adaptive optics compensating for thermal deformation effects or drifts on the exposure system.

Citation Download Citation

Eiichi Seya, Minoru Hidaka, Masaaki Ito, Souichi Katagiri, and Eiji Takeda "In-position optical surface measurement for x-ray projection lithography optics: theory and simulation", Proc. SPIE 2003, Interferometry VI: Techniques and Analysis, (10 December 1993); https://doi.org/10.1117/12.165471

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available