Roughness measurement on supersmooth surfaces with an optical heterodyne profiler

Dirk-Roger Schmitt; Gabriele A. Ringel; Frank Kratz

doi:10.1117/12.172589

1 March 1994 Roughness measurement on supersmooth surfaces with an optical heterodyne profiler

Dirk-Roger Schmitt, Gabriele A. Ringel, Frank Kratz

Proceedings Volume 2004, Interferometry VI: Applications; (1994) https://doi.org/10.1117/12.172589
Event: SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation, 1993, San Diego, CA, United States

Abstract

The Zygo 5500 Optical Heterodyne Profiler was used to investigate the roughness of superpolished optical surfaces made of BK7, Fused Silica, and Zerodur. In opposite to other optical profiling instruments the Heterodyne Profiler makes no use of a reference surface, thus yielding more accurate results on supersmooth substrates. However, it has been found out that a systematic error with an amplitude of about 0.1 nm is generated by the system and interferes with the measuring scan. This error could be originated in a wobble of the air bearing turntable. It is demonstrated that a reference scan representing that error, which is stable in amplitude and phase, can be generated by averaging procedures. Thus, this reference can be removed from the scans of supersmooth substrates yielding to an rms roughness resolution down to 0.013 nm.

Citation Download Citation

Dirk-Roger Schmitt, Gabriele A. Ringel, and Frank Kratz "Roughness measurement on supersmooth surfaces with an optical heterodyne profiler", Proc. SPIE 2004, Interferometry VI: Applications, (1 March 1994); https://doi.org/10.1117/12.172589

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