GaAs MOS Structures

Edward R. Blazejewski; William A. Gutierrez; Herbert L. Wilson; Edward M. Yee

doi:10.1117/12.958136

12 December 1979 GaAs MOS Structures

Edward R. Blazejewski, William A. Gutierrez, Herbert L. Wilson, Edward M. Yee

Proceedings Volume 0203, Recent Advances in TV Sensors and Systems; (1979) https://doi.org/10.1117/12.958136
Event: 23rd Annual Technical Symposium, 1979, San Diego, United States

Abstract

Anodized Ta203/native oxide/n-type (111)B GaAs MOS devices are evaluated using variable frequency capac-itance and conductance measurements. Total movement of the Fermi level is seen restricted to .42 eV by an interface state distribution having a minimum density of 3.5 X 1012 eV^-1 cm^-2 at .84 eV from the conduction band. The anomalous frequency dispersion of the accumulation capacitance, lack of strong inversion and loss mechanisms are discussed. Pulsed deep depletion characteristics and long storage times are observed. Due to the chemically stable nature of the anodized Ta overlayer, linear array burried channel GaAs MOS charge transfer devices were fabricated.

Citation Download Citation

Edward R. Blazejewski, William A. Gutierrez, Herbert L. Wilson, and Edward M. Yee "GaAs MOS Structures", Proc. SPIE 0203, Recent Advances in TV Sensors and Systems, (12 December 1979); https://doi.org/10.1117/12.958136

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