Fourier analysis of complex filtering in the transform plane for obtaining nanometric surface profiles

Jan H. Rakels

doi:10.1117/12.169358

15 March 1994 Fourier analysis of complex filtering in the transform plane for obtaining nanometric surface profiles

Jan H. Rakels

Proceedings Volume 2065, Optics, Illumination, and Image Sensing for Machine Vision VIII; (1994) https://doi.org/10.1117/12.169358
Event: Optical Tools for Manufacturing and Advanced Automation, 1993, Boston, MA, United States

Abstract

The application of phase complex filtering in the transform plane of an imaging system is investigated, by derivation of analytical relationships between surface profiles and the light intensity produced. This analysis is based upon ideal conditions. In order to investigate the behavior under realistic conditions for pure complex filtering (Phase Contrast), a computer simulation program has been devised. This program is based on the Fresnel approximation of the Kirchhoff-Fresnel diffraction integral. The approximation is implemented by using a Fourier transform equivalent. The effects on filter spot size and surface amplitude are detailed.

Citation Download Citation

Jan H. Rakels "Fourier analysis of complex filtering in the transform plane for obtaining nanometric surface profiles", Proc. SPIE 2065, Optics, Illumination, and Image Sensing for Machine Vision VIII, (15 March 1994); https://doi.org/10.1117/12.169358

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