Fourier transform infrared spectroscopy as an analytical tool for etching investigations with silicon

Andreas E. Guber; Uwe Koehler; W. Bier

doi:10.1117/12.166615

31 January 1994 Fourier transform infrared spectroscopy as an analytical tool for etching investigations of silicon

Andreas E. Guber, Uwe Koehler, W. Bier

Proceedings Volume 2089, 9th International Conference on Fourier Transform Spectroscopy; (1994) https://doi.org/10.1117/12.166615
Event: Fourier Transform Spectroscopy: Ninth International Conference, 1993, Calgary, Canada

Abstract

Silicon and its compounds (SiO₂, Si₃N₄) were etched for microelectronic or micromechanical applications using different methods such as plasma etching processes, laser induced etching, or plasmaless etching processes. In our experiments, halogen containing gases, e.g., molecular fluorine or chlorine and interhalogen compounds such as JF₅ or ClF₃ were used as etching agents. Some of the initial gases (JF₅ ClF₃) and most of the reaction products (SiF₄, SiCl₄, ClF₃, ClF) are infrared active. For this reason, online FTIR spectroscopy was applied as the analytical method during our static investigations on plasmaless and laser induced etching.

Citation Download Citation

Andreas E. Guber, Uwe Koehler, and W. Bier "Fourier transform infrared spectroscopy as an analytical tool for etching investigations of silicon", Proc. SPIE 2089, 9th International Conference on Fourier Transform Spectroscopy, (31 January 1994); https://doi.org/10.1117/12.166615

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available