Universal code on modeling of laser-assisted surface processes

O. B. Popovicheva; A. M. Popov; T. V. Rakhimova; E. A. Volkova

doi:10.1117/12.184754

7 September 1994 Universal code on modeling of laser-assisted surface processes

O. B. Popovicheva, A. M. Popov, T. V. Rakhimova, E. A. Volkova

Proceedings Volume 2207, Laser Materials Processing: Industrial and Microelectronics Applications; (1994) https://doi.org/10.1117/12.184754
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria

Abstract

The computer package is presented for modelling of laser influence on the surface in wide range of laser radiation parameters and materials properties. The more extending application of this code is the calculation of 2D thermal field in multilayer structures under the action of moving laser beam. The materials (metals, semiconductors and dielectrics) with different heat conducting properties can be applied for modelling of the structures. The code works well on the curve surface of the structures (deposits or holes). The fundamental dynamics and kinetics of several laser processes have been investigated in some details using this code. The photochemical laser-induced etching in a Cl₂ atmosphere has been investigated. The calculations of 2D differential equations for Cl atoms concentrations produced by gas-phase photodissociation and the photoelectrons generated within Si surface were conducted using our package. The reaction probability was obtained for different laser parameters. On its base we could simulate the depth and feature of etched holes. The method of micropatterning has been suggested. A pyrolitic process of deposition of a metal film on the SiO₂ surface has been considered. The temperature profiles inside of W-SiO₂ structures were calculated. It has been shown that the heating of existing metallization layer is the source of warming up of the SiO₂ substrate following the further deposition of metal film. The metallization layer depth have been obtained at pyrolysis of W(CO)₆.

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O. B. Popovicheva, A. M. Popov, T. V. Rakhimova, and E. A. Volkova "Universal code on modeling of laser-assisted surface processes", Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); https://doi.org/10.1117/12.184754

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KEYWORDS

Chlorine

Silicon

Etching

Metals

Laser processing

Chemical species

Semiconductor lasers

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