Microstructural and optical characteristics of waveguiding piezoelectric zinc oxide films

V. M. Shevtsov; A. Y. Agapov; P. M. Zhitkov

doi:10.1117/12.185162

25 August 1994 Microstructural and optical characteristics of waveguiding piezoelectric zinc oxide films

V. M. Shevtsov, A. Y. Agapov, P. M. Zhitkov

Proceedings Volume 2212, Linear and Nonlinear Integrated Optics; (1994) https://doi.org/10.1117/12.185162
Event: Integrated Optoelectronics '94, 1994, Lindau, Germany

Abstract

Optical and microstructural characteristics of polycrystalline waveguiding ZnO films deposited by RF reactive sputtering has been investigated. The origin of high waveguiding mode propagation losses and spatial inhomogeneity of the sputtered films has been investigated experimentally. A technique allowing to avoid these disadvantages has been proposed. Using this technique free of mechanical stress highly oriented textured ZnO waveguiding films with optical propagation loss less than 1 dB/cm have been deposited.

Citation Download Citation

V. M. Shevtsov, A. Y. Agapov, and P. M. Zhitkov "Microstructural and optical characteristics of waveguiding piezoelectric zinc oxide films", Proc. SPIE 2212, Linear and Nonlinear Integrated Optics, (25 August 1994); https://doi.org/10.1117/12.185162

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