New microoptical devices based on micromechanics

Rainer Riesenberg; Johann Michael Koehler; Horst Porwol

doi:10.1117/12.180985

28 July 1994 New microoptical devices based on micromechanics

Rainer Riesenberg, Johann Michael Koehler, Horst Porwol

Author Affiliations +

Proceedings Volume 2213, Nanofabrication Technologies and Device Integration; (1994) https://doi.org/10.1117/12.180985
Event: Integrated Optoelectronics '94, 1994, Lindau, Germany

Abstract

New micro-optical devices are presented: a modulated thermal IR source and an electrical controllable micromirror for image formation with an adjustable focal length ranging from (infinity) down to 0.001 m. These integrable thermo-optical devices base on micromechanics and thin film technology. Device fabrication, the physical background, properties, advantages, limitations, especially size effects, and experimental examples are given.

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Rainer Riesenberg, Johann Michael Koehler, and Horst Porwol "New microoptical devices based on micromechanics", Proc. SPIE 2213, Nanofabrication Technologies and Device Integration, (28 July 1994); https://doi.org/10.1117/12.180985

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