Advanced die-to-database reticle machine for 64-Mbit DRAMs

Yair Eran; Gideon Rossman

doi:10.1117/12.191949

3 November 1994 Advanced die-to-database reticle machine for 64-Mbit DRAMs

Yair Eran, Gideon Rossman

Proceedings Volume 2254, Photomask and X-Ray Mask Technology; (1994) https://doi.org/10.1117/12.191949
Event: Photomask Japan '94, 1994, Kawasaki City, Kanagawa, Japan

Abstract

This report describes the RT-8000 product line of advanced reticle inspection systems for 64 and 256 Mbit DRAMs. The description is given from the system designer point of view. The main issues that are discussed are the methodologies used in the early phase of design and the design guidelines that help to meet the marketing goals. The central subject is the system architecture and its relation to the marketing needs.

Citation Download Citation

Yair Eran and Gideon Rossman "Advanced die-to-database reticle machine for 64-Mbit DRAMs", Proc. SPIE 2254, Photomask and X-Ray Mask Technology, (3 November 1994); https://doi.org/10.1117/12.191949

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