A New Approach To High Precision Phase Measurement Interferometry

N. Balasubramanian; G. W DeBell

doi:10.1117/12.958823

8 August 1980 A New Approach To High Precision Phase Measurement Interferometry

N. Balasubramanian, G. W DeBell

Proceedings Volume 0230, Minicomputers and Microprocessors in Optical Systems; (1980) https://doi.org/10.1117/12.958823
Event: 1980 Technical Symposium East, 1980, Washington, D.C., United States

Abstract

In this paper the architecture and measurement capabilities of a new digitally assisted high precision phase measurement interferometer are discussed. A brief discussion of the error sources in the instrument is presented. The capabilities of the instrument are demonstrated with specific examples.

Citation Download Citation

N. Balasubramanian and G. W DeBell "A New Approach To High Precision Phase Measurement Interferometry", Proc. SPIE 0230, Minicomputers and Microprocessors in Optical Systems, (8 August 1980); https://doi.org/10.1117/12.958823

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