MEMaterial: a new microelectronic material deposition tool

Fariborz Maseeh

doi:10.1117/12.186783

16 September 1994 MEMaterial: a new microelectronic material deposition tool

Fariborz Maseeh

Proceedings Volume 2336, Manufacturing Process Control for Microelectronic Devices and Circuits; (1994) https://doi.org/10.1117/12.186783
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

A new material simulation tool is developed which shows physical, thermal, mechanical, electrical and optical properties of thin films as a function of their manufacturing processes. The software uses a unique multidimensional estimation routine developed specifically for properties that vary with several parameters simultaneously. Substantial testing of the estimation software shows reliability of predictions in the range of 2 to 20 percent of the measured property values.

Citation Download Citation

Fariborz Maseeh "MEMaterial: a new microelectronic material deposition tool", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186783

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