Optical investigations of thin hydrogenated carbon (C:H) films

Valerie A. Ligachov; Anatolyi I. Popov; Sergei N. Stuokach

doi:10.1117/12.186636

14 September 1994 Optical investigations of thin hydrogenated carbon (C:H) films

Valerie A. Ligachov, Anatolyi I. Popov, Sergei N. Stuokach

Proceedings Volume 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing; (1994) https://doi.org/10.1117/12.186636
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

I 'S well Imown rac t that propert ies or bydrogenat ed carbon (C : H ) rums are strongly influenced by deposit ion cond.i t ions or the rums [1]. This allow us use C:H rums ror d.irrerent applica— t ions , but we must understand how composition and propert ies or the rums are corinec t ed. with them clepos it ion conch t ions . In the work we will consider results or optical investigation or 0:11 rilms, prepared by RF sputtering, and try to explain results ob tained on the base or model ror "graphite—like" components con densation regimes on surrace or growing rum.

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Valerie A. Ligachov, Anatolyi I. Popov, and Sergei N. Stuokach "Optical investigations of thin hydrogenated carbon (C:H) films", Proc. SPIE 2337, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing, (14 September 1994); https://doi.org/10.1117/12.186636

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