Short-time investigation of deposition processes

Thomas Witke; Peter Siemroth; Thomas Schuelke; B. Schultrich; Emil Ott

doi:10.1117/12.209567

30 May 1995 Short-time investigation of deposition processes

Thomas Witke, Peter Siemroth, Thomas Schuelke, B. Schultrich, Emil Ott

Proceedings Volume 2513, 21st International Congress on: High-Speed Photography and Photonics; (1995) https://doi.org/10.1117/12.209567
Event: High-Speed Photography and Photonics: 21st International Congress, 1994, Taejon, Korea, Republic of

Abstract

The High Speed Framing Camera (HSFC) is a new high speed camera for investigations of processes in the ranges of nanoseconds and micrometers. This camera was designed especially for our studies of deposition processes. In pulsed laser deposition (PLD), vacuum arc deposition (VAD) and material deposition by channel spark the target material is evaporated and ionized in a fast process of some nanoseconds duration. New depositional applications require higher efficiency and modified plasma parameters. Therefore the processes of explosive plasma production must be studied with an adequate temporal and spatial resolution. The HSFC combines a microscopical resolution of 10 micrometers with a nanosecond time resolution and a very high optical sensitivity. Therefore a high resolution long-distance microscope QUESTAR is combined with a four channel intensifying CCD camera.

Citation Download Citation

Thomas Witke, Peter Siemroth, Thomas Schuelke, B. Schultrich, and Emil Ott "Short-time investigation of deposition processes", Proc. SPIE 2513, 21st International Congress on: High-Speed Photography and Photonics, (30 May 1995); https://doi.org/10.1117/12.209567

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available