Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system

Yukito Furukawa; Kazushi Yokoyama; Ken-ichi Inoue; Kiyotaka Ishibashi; Hirofumi Fukuyama

doi:10.1117/12.221591

25 September 1995 Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system

Yukito Furukawa, Kazushi Yokoyama, Ken-ichi Inoue, Kiyotaka Ishibashi, Hirofumi Fukuyama

Author Affiliations +

Proceedings Volume 2522, Electron-Beam Sources and Charged-Particle Optics; (1995) https://doi.org/10.1117/12.221591
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

A new styled compact wavelength dispersive X-ray spectrometer for light elements analysis has been developed. This spectrometer was applied for soft X-ray detection (energy less than 1 keV) mounted on a compact high-energy ion microprobe system `mikro-i' and combined with particle-induced X-ray emission in this system. Two multilayer monochrometers, W/Si multilayer and Ni/C multilayer, settled on the compact multilayer benders for X-ray diffraction, and a gas proportional counter with a wide (150 mm X 20 mm) and thin (1 micrometers thickness) polymer film window for soft X-ray made it possible to achieve the compact dimensions of the spectrometer. This system was evaluated for K lines emitted from light elements such as boron, carbon, nitrogen and oxygen. The energy resolution less than 21 eV for each element was observed and was enough to discriminate their characteristic X-rays from disturbing ones. Also, the sensitivity was enough to analyze trace elements or microarea.

Citation Download Citation

Yukito Furukawa, Kazushi Yokoyama, Ken-ichi Inoue, Kiyotaka Ishibashi, and Hirofumi Fukuyama "Compact wavelength dispersive x-ray spectrometer for light elements in high-energy ion microprobe system", Proc. SPIE 2522, Electron-Beam Sources and Charged-Particle Optics, (25 September 1995); https://doi.org/10.1117/12.221591

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