Measurement of static friction in mechanical couplings of articulated microrobots

Richard Yeh; Kristofer S. J. Pister

doi:10.1117/12.221182

15 September 1995 Measurement of static friction in mechanical couplings of articulated microrobots

Richard Yeh, Kristofer S. J. Pister

Author Affiliations +

Proceedings Volume 2642, Micromachined Devices and Components; (1995) https://doi.org/10.1117/12.221182
Event: Micromachining and Microfabrication, 1995, Austin, TX, United States

Abstract

Force measurements from 3D polysilicon mechanisms under various loading conditions are presented. Force was measured using the deflection of polysilicon spring gauges with known dimensions and estimated elastic properties. Force measurements were made to determine the force required to overcome static friction when rotating hinged structures with and without external loading using a sliding mechanism. Both loaded and unloaded mechanisms display a wide statistical variation in friction force. Unloaded mechanisms require on average 1-5 (mu) N of force to move, whereas mechanisms manipulating 3.5 (mu) N loads require on average 1-10 (mu) N of force. These measurements are motivated by an effort to produce articulated microrobots, and progress in this area is also discussed.

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Richard Yeh and Kristofer S. J. Pister "Measurement of static friction in mechanical couplings of articulated microrobots", Proc. SPIE 2642, Micromachined Devices and Components, (15 September 1995); https://doi.org/10.1117/12.221182

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