Design and fabrication issues in the development of monolithic micro-optical systems

Charles M. Egert; Slobodan Rajic

doi:10.1117/12.234624

8 March 1996 Design and fabrication issues in the development of monolithic micro-optical systems

Charles M. Egert, Slobodan Rajic

Proceedings Volume 2687, Miniaturized Systems with Micro-Optics and Micromechanics; (1996) https://doi.org/10.1117/12.234624
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

The micro-sensor field is presently proliferating with designs and approaches. We have recently been involved with several mini/micro optical systems which have pointed out several trends in design and fabrication that are somewhat more important to these smaller optical systems. These include; material choices, alignment strategies, fabrication methods, and freedom and complexity of the optical designs. Our recent experience indicates that since mini/micro optical systems are likely to be produced in much higher number, that traditional fabrication methods could prove exorbitantly expensive. Deterministic fabrication methods employing inherently self-aligning features are well worth investigating. This is particularly true for monolithic systems that fall into that `grey' area between mini and truly micro optical systems.

Citation Download Citation

Charles M. Egert and Slobodan Rajic "Design and fabrication issues in the development of monolithic micro-optical systems", Proc. SPIE 2687, Miniaturized Systems with Micro-Optics and Micromechanics, (8 March 1996); https://doi.org/10.1117/12.234624

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