Mathematical modeling of nonequilibrium heating and melting of Si by Nd-YAG laser radiation at 1.06 um

Vladimir I. Mazhukin; V. V. Nosov

doi:10.1117/12.234195

1 March 1996 Mathematical modeling of nonequilibrium heating and melting of Si by Nd-YAG laser radiation at 1.06 μm

Vladimir I. Mazhukin, V. V. Nosov

Proceedings Volume 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95; (1996) https://doi.org/10.1117/12.234195
Event: Fifth International Conference on Industrial Laser and Laser Applications '95, 1995, Shatura, Moscow, Russian Federation

Abstract

The mathematical model of the nonequilibrium heating and the phase transformations in Si is considered induced by the nanosecond pulse laser irradiation at 1.06 micrometer. Taken into account are the complex dynamics of the radiation absorption, the electron-hole plasma development, the heat diffusion and the radiation transfer. The simulation results show the self-regenerative nature of the radiation absorption process as well as significant overheating of plasma and formation of overheated metastable region in solid phase.

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Vladimir I. Mazhukin and V. V. Nosov "Mathematical modeling of nonequilibrium heating and melting of Si by Nd-YAG laser radiation at 1.06 μm", Proc. SPIE 2713, Fifth International Conference on Industrial Lasers and Laser Applications '95, (1 March 1996); https://doi.org/10.1117/12.234195

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