Defect enhancement of periodic structure using dye-doped liquid-crystal cells

Jun-ichi Kato

doi:10.1117/12.2299153

1 September 1996 Defect enhancement of periodic structure using dye-doped liquid-crystal cells

Jun-ichi Kato

Author Affiliations +

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27787I (1996) https://doi.org/10.1117/12.2299153
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

A nonlinear spatial filtering based on light-induced birefringence change in dye-doped liquid crystals has been applied to defect inspection of periodic structure. Photoisomer- ization of azo-dye molecules leads to local reorientation of the liquid-crystal molecules, by which polarization of the transmitted light is modulated depending on the incident light intensity. By selecting suitable polarization of the transmitted light, a self-aligned spatial filtering is realized. The filtering performances have been experimentally investigated.

Citation Download Citation

Jun-ichi Kato "Defect enhancement of periodic structure using dye-doped liquid-crystal cells", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27787I (1 September 1996); https://doi.org/10.1117/12.2299153

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