General hierarchical approach in absolute phase measurement

Wolfgang Osten; Werner Nadeborn; Peter Andrae

doi:10.1117/12.276292

17 July 1996 General hierarchical approach in absolute phase measurement

Wolfgang Osten, Werner Nadeborn, Peter Andrae

Proceedings Volume 2860, Laser Interferometry VIII: Techniques and Analysis; (1996) https://doi.org/10.1117/12.276292
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Starting from a description of the absolute phase problem in fringe processing and a discussion of existing solutions a general approach for robust absolute phase measurement in optical metrology is presented. Using this method the continous phase field can be reconstructed with high accuracy by a stepwise or so called hierarchical approach without any interaction necessary in conventional phase unwrapping if technical objects have to be investigated. The determination of the sequence of synthetic wavelengths is strongly oriented on the phase measuring accuracy and the known limits of the absolute phase. Keywords: optical metrology, shape measurement, displacement measurement, fringe processing, absolute phase measurement

Citation Download Citation

Wolfgang Osten, Werner Nadeborn, and Peter Andrae "General hierarchical approach in absolute phase measurement", Proc. SPIE 2860, Laser Interferometry VIII: Techniques and Analysis, (17 July 1996); https://doi.org/10.1117/12.276292

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