Laser machining of single-mode rib waveguides on germanosilicate slabs

Peter R. Herman; Jianhao Yang; Kou Kurosawa; Takayuki Yamanishi

doi:10.1117/12.273724

9 May 1997 Laser machining of single-mode rib waveguides on germanosilicate slabs

Peter R. Herman, Jianhao Yang, Kou Kurosawa, Takayuki Yamanishi

Proceedings Volume 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II; (1997) https://doi.org/10.1117/12.273724
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Laser ablation was applied for the first time to define a rib waveguide on silica-based planar waveguides. The strong linear absorption of 157-nm radiation was key for producing smooth walls without surface microcracks or significant debris. The laser-formed rib guides were single-mode at 0.635-micrometer wavelength and had optical losses of approximately 4 dB/cm as a result of an approximately 40 nm (rms) surface roughness. Simple refinements to the laser etching procedure and extensions to 1.55-micrometer telecommunication wavelengths promise commercially attractive losses (less than or equal to 1 dB/cm) for application in processing optical integrated circuits.

Citation Download Citation

Peter R. Herman, Jianhao Yang, Kou Kurosawa, and Takayuki Yamanishi "Laser machining of single-mode rib waveguides on germanosilicate slabs", Proc. SPIE 2991, Laser Applications in Microelectronic and Optoelectronic Manufacturing II, (9 May 1997); https://doi.org/10.1117/12.273724

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