Replication techniques for micro-optics

Thomas G. Harvey

doi:10.1117/12.281256

24 September 1997 Replication techniques for micro-optics

Thomas G. Harvey

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281256
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Materials and techniques for manufacturing replicated micro- optical elements are reviewed. Factors such as choice of material, changes in physical dimensions, feature size and cost are considered. The manufacture of a 1.5 micrometers period radial grating for a rotation encoder is described. Replicas of the grating were made from the same Ni shim by reel-to- reel UV embossing, CD injection molding and flat bed hot embossing. The dimensions of the replica parts were measured and compared. The diffraction efficiency of the UV embossed replicas was found to be only slightly less than the theoretical maximum efficiency.

Citation Download Citation

Thomas G. Harvey "Replication techniques for micro-optics", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281256

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