Surface And Figure Characterization Of Grazing Incidence Optics

J. Eisenberger; A. W. Naugler; W. Rambauske

doi:10.1117/12.933016

3 May 1982 Surface And Figure Characterization Of Grazing Incidence Optics

J. Eisenberger, A. W. Naugler, W. Rambauske

Proceedings Volume 0315, Reflecting Optics for Synchrotron Radiation; (1982) https://doi.org/10.1117/12.933016
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

Techniques for manufacturing grazing incidence optics have been developed by Applied Optics Center during the past few years. Techniques include diamond machining and low scatter finishing. In testing grazing incidence optics for surface figure, slope error can be determined interferometrically or preferably, with a non-contact profilometer developed by Applied Optics Center

Citation Download Citation

J. Eisenberger, A. W. Naugler, and W. Rambauske "Surface And Figure Characterization Of Grazing Incidence Optics", Proc. SPIE 0315, Reflecting Optics for Synchrotron Radiation, (3 May 1982); https://doi.org/10.1117/12.933016

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