Contactless manipulation of microparts by electric field traps

Felix M. Moesner; Toshiro Higuchi

doi:10.1117/12.298034

1 January 1998 Contactless manipulation of microparts by electric field traps

Felix M. Moesner, Toshiro Higuchi

Proceedings Volume 3202, Microrobotics and Microsystem Fabrication; (1998) https://doi.org/10.1117/12.298034
Event: Intelligent Systems and Advanced Manufacturing, 1997, Pittsburgh, PA, United States

Abstract

In an earlier paper by the authors, down-scaled devices for microparts handling utilizing an AC electric field boundary wave were proposed. Devices that instantly generate contactless microparts driving forces through electric field creation have been designed and fabricated. In a further attempt, the mechanisms behind microparts conveyance are here subsequently validated in experiments and simulations. Particles as micropart substitute are actuated. On a thin protecting insulation-film above a series of encased and insulated parallel field electrodes, particles become either triboelectrically or induction charged through the application of balanced multi-phase voltages. The created non-uniform traveling field-wave conveys the charged particles perpendicular to the electrodes confined in electric filed traps from electrode to electrode. A series of particle materials with diameters up to 400 micrometers has been examined; metal, glass, and plastic spheres showed the best performances. Simulations of the potential distribution underline the experimental findings on the electric panel and dots device. One further result, which could ave been shown by experiments, is the pre-oscillation of a moving particle caused by gravity.

Citation Download Citation

Felix M. Moesner and Toshiro Higuchi "Contactless manipulation of microparts by electric field traps", Proc. SPIE 3202, Microrobotics and Microsystem Fabrication, (1 January 1998); https://doi.org/10.1117/12.298034

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