CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 3224 > Article
Paper
5 September 1997 Design of a Σ-Δ converter-based automotive sensor
Barun K. Kar, Eric Joseph
Author Affiliations +
Proceedings Volume 3224, Micromachined Devices and Components III; (1997) https://doi.org/10.1117/12.284503
Event: Micromachining and Microfabrication, 1997, Austin, TX, United States
Abstract
The design of a second order (Sigma) - (Delta) converter based microaccelerometer is presented in this paper. This converter has a large dynamic range, i.e., can measure acceleration from 0.5 g to 500 g, and provides directly digital output. The force-rebalance circuitry constraints the sensor mass to move within 10 percent of the distance between the polysilicon layers. The system is inherently linear and has a simple electronic interface.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Barun K. Kar and Eric Joseph "Design of a Σ-Δ converter-based automotive sensor", Proc. SPIE 3224, Micromachined Devices and Components III, (5 September 1997); https://doi.org/10.1117/12.284503
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 6 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Sensors
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top